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CAA-175-1S

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
10 Á¦Ç°À̹ÌÁö

CAA4-175-1S

1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
9 Á¦Ç°À̹ÌÁö

CAA-175-3S

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
8 Á¦Ç°À̹ÌÁö

CAAR-175

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
7 Á¦Ç°À̹ÌÁö

CAA-200-1S

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
6 Á¦Ç°À̹ÌÁö

CAA-200-3S

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
5 Á¦Ç°À̹ÌÁö

CAA4-200

1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
4 Á¦Ç°À̹ÌÁö

CAAR-200

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
3 Á¦Ç°À̹ÌÁö

CAA-300

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
2 Á¦Ç°À̹ÌÁö

CAA4-300

1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
1 Á¦Ç°À̹ÌÁö

CAAR-300

Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø