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MODEL
NUMBER
RESOLUTION
(㎛)
MAX.VELOCITY
(m/s)
POSITIONAL
REPEATABILITY
(㎛)
STAIGHTNESS
(㎛)
POSITIONAL
ACCURACY
(㎛)

LMS20

LMS30

LMS50
0.1
0.5
±0.5
20
±1.0
0.5
1.5
±1.0
20
±2.0
1.0
4.0
±1.0
20
±2.0
5.0
5.0
±5.0
20
±10.0
10
5.0
±10.0
20
±20.0